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PHOENIX L300i Helium Leak Detector | HVS

HVS

Helium Leak Detection

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PHOENIX L300i Helium Leak Detector

Leybold 300i Helium Leak DetectorThe Oerlikon Leybold Vacuum Phoenix L300 is a mobile helium leak detector suited for use on mass production lines and service work leak testing large volume vessels. It has an oil-free gas inlet system which allows it to be used for leak testing of analytical systems, optical systems, or in the semiconductor industry. It’s lowest detectable leak rate for helium is 5 x 10-¹² mbar l/s.

The Phoenix L300 Dry with an entirely oil-free vacuum system and the Phoenix L300 Modul with an additional forevacuum system for leak testing large volume vessels are also available to buy or rent.

Leak Detector Industries & Applications:

  • Semiconductor production
  • Vacuum Coating
  • Research and Development
  • Chemistry/Pharmaceutical
  • Metallurgy/Furnaces
  • Lamps and Tube Manufacturing
  • Automotive Industry
  • Laser Engineering
  • Analytical Engineering
  • Quality Assurance
  • Power Plants & Power Generation
  • Electrical Engineering
  • Industries with Vacuum Systems or Vacuum Processes
  • High and Ultrahigh Vacuum Technology
  • Mechanical Engineering
  • Systems Engineering
  • UHV applications

Leak Detector Functions & Specifications

  • Integrated calibrated leak and automatic calibration
  • Leak detection starting atan inlet pressure of 15 mbar
  • Oil-free gas inlet system
  • Measurement range of 12 decades
  • Trend/bargraph leak rate display
  • Minimum detectable helium leak 5.10-12 atm.cc/s
  • Maximum inlet test pressure 15 mbar
  • Helium pumping speed in vacuum mode 2.5 l/s
  • Minimum detectable helium leak in sniffing mode 1.10-7 atm.cc/s
Oerlikon Leybold Units  PHOENIX L300 PHOENIX L300 Dry PHOENIX L300 Wet
Sensitivity (vacuum) mbar l/s ≤ 5 · 10-12 ≤ 3 · 10-11 ≤ 5 · 10-12
Sensitivity (sniffer) mbar l/s ≤ 1 · 10-7 ≤ 1 · 10-7 ≤ 1 · 10-7
Maximum inlet pressure mbar 15 15 15
Helium pumping speed l/s >2.5 >2.5 >2.5
Time until ready min ≤2 ≤2 ≤2
Dimensions (w x h x d) mm 495 x 456 x 314 495 x 456 x 314 495 x 456 x 314
Weight kg 40 35.5 29.5

Related Data Sheets and Documents

Leybold Helium Leak Detector Line

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